JPH0614398Y2 - イオン源用電極 - Google Patents
イオン源用電極Info
- Publication number
- JPH0614398Y2 JPH0614398Y2 JP14046288U JP14046288U JPH0614398Y2 JP H0614398 Y2 JPH0614398 Y2 JP H0614398Y2 JP 14046288 U JP14046288 U JP 14046288U JP 14046288 U JP14046288 U JP 14046288U JP H0614398 Y2 JPH0614398 Y2 JP H0614398Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrode plate
- magnet insertion
- brazing
- insertion groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000037431 insertion Effects 0.000 claims description 27
- 238000003780 insertion Methods 0.000 claims description 27
- 238000005219 brazing Methods 0.000 claims description 22
- 238000001816 cooling Methods 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 description 10
- 238000000605 extraction Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14046288U JPH0614398Y2 (ja) | 1988-10-27 | 1988-10-27 | イオン源用電極 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14046288U JPH0614398Y2 (ja) | 1988-10-27 | 1988-10-27 | イオン源用電極 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0261053U JPH0261053U (en]) | 1990-05-07 |
JPH0614398Y2 true JPH0614398Y2 (ja) | 1994-04-13 |
Family
ID=31404656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14046288U Expired - Lifetime JPH0614398Y2 (ja) | 1988-10-27 | 1988-10-27 | イオン源用電極 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0614398Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6521303B2 (ja) * | 2015-04-23 | 2019-05-29 | 日新電機株式会社 | 荷電粒子源 |
-
1988
- 1988-10-27 JP JP14046288U patent/JPH0614398Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0261053U (en]) | 1990-05-07 |
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